The Metal Oxide Semiconductor Field Effect Transistor (MOSFET) is the most important device at the forefront of high-density integrated circuits such as microprocessors and semiconductor memories. It is also becoming an important power device. The principle of the surface field-effect transistor was first proposed in the 1930s and the first MOSFET was reported in 1960 using the Si-SiO2 system.
The current in MOSFET is transported by carriers of one polarity only and hence it is usually referred to as a unipolar device. Although MOSFETs have been made with various semiconductors, such as Ge, Si, and GaAs and use various insulators such as SiO₂, Si₃N₄ and Al₂0₃, the most important system is Si-SiO₂.
The drain current density including both drift and diffusion component is given by: